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High Purity Gas Regulators
Chiyoda Seiki’s “Excellent” series high purity gas regulators are carefully constructed for using properly in electronic, aerospace and ultra-pure gas system fields. Ex-mk II Series are consisted in three grades, such as G1, G2 and G3. Each grade product is constructed under careful consideration about the construction. Applications: Analysis Carrier Gases, Semiconductor Manufacturing Gases, Poisonous & corrosive gases.
 

Grade	G1	G2	G3
Helium leak rate Connections	≦1×10－8 Acc/sec. 1/4VCR or Tube	≦1×10－7 Acc/sec. Screw in	Compressed He 12hours Screw in
Cleaning Assembling Material Packaging	Tow-steps ultrasonically cleaning In a Class 1000 Clean room Stainless steel 316 Packed in a polyethylene film under N2

 

Models	EX-20mkⅡ	EX-100mkⅡ	EX-300mkⅡ	EX-400mkⅡ
Max. Inlet Pressure (kgf/cm2)	220	220	220	220
Max. Delivery Pressure (kgf/cm2)	10	10	6	6
Normal Flow Rate (NL/min)	20	100	20	100
Max. Flow Rate (NL/min)	50	150	30	150
Flow Coefficient (CV=	0.05max	0.05max	0.05max	0.05max
Temperature Range (℃)	－10～60	－10～60	－10～60	－10～60
Dew Point (℃)	－70	－70	－70	－70
Helium Leak Rate (Acc/sec)	≦1×10－8	≦1×10－8	≦1×10－8	≦1×10－8
Weight (kg)	1.2	1.3	1.9	2.0