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High Purity Gas Regulators
Chiyoda Seiki’s “Excellent” series high purity gas regulators are carefully constructed for using properly in electronic, aerospace and ultra-pure gas system fields. Ex-mk II Series are consisted in three grades, such as G1, G2 and G3. Each grade product is constructed under careful consideration about the construction. Applications: Analysis Carrier Gases, Semiconductor Manufacturing Gases, Poisonous & corrosive gases.
 

Grade	G1	G2	G3
Helium leak rate Connections	≦1×10－8 Acc/sec. 1/4VCR or Tube	≦1×10－7 Acc/sec. Screw in	Compressed He 12hours Screw in
Cleaning Assembling Material Packaging	Tow-steps ultrasonically cleaning In a Class 1000 Clean room Stainless steel 316 Packed in a polyethylene film under N2

 

Models	EX-500mkⅡ	EX-600mkⅡ	EX-700mkⅡ	EX-1000mkⅡ	EX-4000
Max. Inlet Pressure (kgf/cm2)	30	30	20	10	10
Max. Delivery Pressure (kgf/cm2)	10	10	10	8	8
Normal Flow Rate (NL/min)	20	100	300	1000	4000
Max. Flow Rate (NL/min)	50	150	450	2000	5000
Flow Coefficient (CV=	0.17	0.17	0.60	1.75	3.58
Temperature Range (℃)	－10～60	－10～60	－10～60	－10～60	－10～60
Dew Point (℃)	－70	－70	－70	－70	－70
Helium Leak Rate (Acc/sec)	≦1×10－8	≦1×10－8	≦1×10－7	≦1×10－6	≦1×10－6
Weight (kg)	0.9	1.0	3.5	6.0	16