Details

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Ex-M (Excellent Mega) Series single stage stainless steel regulators are designed for Instrument Analysis or Semiconductor Manufacturers where high purity must be maintained. This series regulators are more accuracy than our EX-mk II series and have been founded to have a leakage rate of less than 1 x 10-10 Acc/sec. of helium.

Specifications

Models	EX-M-20	EX-M-100	EX-M-500	EX-M-600
Max. Inlet Pressure (kgf/cm2)	220	220	30	30
Max. Delivery Pressure (kgf/cm2)	10	10	10	10
Normal Flow Rate (NL/min)	20	100	20	100
Max. Flow Rate (NL/min)	50	150	50	150
Flow Coefficient (CV=	0.05	0.05	0.17	0.17
Temperature Range (℃)	－10～60	－10～60	－10～60	－10～60
Dew Point (℃)	-74	-74	-74	-74
Helium Leak Rate (Acc/sec)	≦1×10－10	≦1×10－10	≦1×10－10	≦1×10－10
Connections	1/4 VCR or Tube	1/4 VCR or Tub	1/4 VCR or Tube	1/4 VCR or Tube
Weight (kg)	1.2	1.3	0.9	1.0
Surface Finish	Electropolished Rmax. 0.7μm

※EX-M-700, EX-M-1000, EX-M-4000 regulators available for large flow